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Model F Vertical Turbomolecular Pump
  • Uses and features
  • Specification parameter
    Product Applications
     
    The turbomolecular pump is used for the application of high and ultra-high vacuum.
    It can not be used for direct deflation to atmosphere and needs to be equipped with backing pump
     
    Main applications:
     
    ●Surface physics and analytical instrument
    ●Plasma physics and space research
    ●Nuclear fusion utilities
    ●Atomic&molecullar beam system.particle accelerator
    ●Vacuum coating
    ●Vacuum smelting
    ●Semiconductor and  optical industry

    Product Features
     
    ●Compact,easy to install and use
    ●Low vibration and noise.perfect rotary balance
    ●Constant rotating speed in the rang of 10-1~10-8pa
    ●Ceramic bearing with long servlce life
    F型涡轮分子泵
    Model F Vertical  Turbomolecular  Pump
    技术参数Technical specifications:
    型号 
    Model
    FC-150/450 FG-150/450 FC-250/1400 FG-250/1400 F-400B/3500
    进气口法兰 
    Inlet flange  (mm)
    DN160CF DN160LF DN250CF DN250LF DN400LF
    出气口法兰 
    Oulet flange  (mm)
    DN40KF DN63LF DN100LF
    抽气速度  
    Pumping speed  (L/S)
    450 1400 3500
    极限压力
    Ultimate pressure
    不烘烤
    Without baking  (Pa)
    6×10-6 6×10-6 6×10-6
    压缩比
    Compression ratio
    对N2 108 108 108
    对H2 102 102 102
    转速RPM   (r/min) 24000 24000 14100
    起动时间  
    Start-up time <(Min)
    5 10 20
    前级压力  
    Fore pressure <(Pa)
    10 10 10
    建议采用的前级泵
    Recommended backing pump  (L/s)
    8 15 30
    冷却水温度
    Cooling water temperature <(℃)
    ≤25 ≤25 ≤25
    冷却水压力
    Cooling water pressure (Mpa)
    0.196 0.196 0.196
    泵体烘烤温度
    Temperature of baking <(℃)
    120 120 120
    重量  
    Weight(Kg)
    35 70 125